| [BBD+18] | Janis Breuer, Michael Bachmann, Felix Düsberg, Andreas Pahlke, Simon Edler, Christoph Langer, Christian Prommesberger, Robert Lawrowski, Rupert Schreiner, Pavel Serbun, and Dirk Lützenkirchen-Hecht. Extraction of the current distribution out of saturated integral measurement data of p-type silicon field emitter arrays. Journal of Vacuum Science & Technology B, 36(5):051805, September 2018. [ DOI | http ] |
| [PLS18] | C. Prommesberger, C. Langer, and R. Schreiner. Stable and low noise field emission from single p-type Si-tips. In Proceedings of the 31th IVNC, pages 1-2, Kyoto, Japan, July 2018. [ DOI ] |
| [SPM+18] | P. Serbun, V. Porshyn, G. Müller, D. Lützenkirchen-Heicht, C. Prommesberger, C. Langer, R. Lawrowski, and R. Schreiner. Field emission behavior of single n- and p-type black Si pillar structures. In Proceedings of the 31th IVNC, pages 1-2, Kyoto, Japan, July 2018. [ DOI ] |
| [LBL+18] | M. Lindner, D. Berndt, C. Langer, C. Prommesberger, and R. Schreiner. Field emission assisted micro plasma discharges at vacuum and atmospheric pressures. In Proceedings of the 31th IVNC, pages 1-2, Kyoto, Japan, July 2018. [ DOI ] |
| [SPLH+18] | P. Serbun, V. Porshyn, D. Lützenkirchen-Hecht, C. Prommesberger, C. Langer, R. Lawrowski, and R. Schreiner. Photosensitivity of single silicon high-aspect-ratio tips with different doping levels. In Proceedings of the 31th IVNC, pages 1-2, Kyoto, Japan, July 2018. [ DOI ] |
| [LLSS18] | R. Lawrowski, C. Langer, R. Schreiner, and J. Sellmair. Nano Emitters on Silicon Pillar Structures generated by a Focused Electron Beam Induced Deposition. In Proceedings of the 31th IVNC, pages 1-2, Kyoto, Japan, July 2018. [ DOI ] |
| [LHP+18] | C. Langer, M. Hausladen, C. Prommesberger, R. Lawrowski, M. Bachmann, F. Düsberg, A. Pahlke, M. Shamonin, and R. Schreiner. Field emission current investigation of p-type and metallized silicon emitters in the frequency domain. In Proceedings of the 31th IVNC, pages 1-2, Kyoto, Japan, July 2018. [ DOI ] |
| [EHB+18] | S. Edler, W. Hansch, M. Bachmann, F. Düsberg, M. Hofmann, J. Jakši c, J. Breuer, F. Dams, A. Pahlke, C. Langer, R. Lawrowski, C. Prommesberger, and R. Schreiner. Influence of adsorbates on the performance of a field emitter array in a high voltage triode setup. In Proceedings of the 31th IVNC, pages 1-2, Kyoto, Japan, July 2018. [ DOI ] |
| [BRS+18] | Johannes Bieker, Farough Roustaie, Helmut F. Schlaak, Christoph Langer, Rupert Schreiner, Marcel Lotz, and Stefan Wilfert. Field emission characterization of in situ deposited gold nanocones with variable cone densities. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 36(2):02C105, January 2018. [ DOI | http ] |
| [PBD+17] | Christian Prommesberger, Michael Bachmann, Felix Düsberg, Christoph Langer, Robert Lawrowski, Martin Hofmann, Andreas Pahlke, and Rupert Schreiner. Regulation of the Transmitted Electron Flux in a Field-Emission Electron Source Demonstrated on Si Nanowhisker Cathodes. IEEE Transactions on Electron Devices, 64(12):5128-5133, December 2017. [ DOI | http ] |
| [EBB+17] | Simon Edler, Michael Bachmann, Janis Breuer, Florian Dams, Felix Düsberg, Martin Hofmann, Jasna Jakšič, Andreas Pahlke, Christoph Langer, Robert Lawrowski, Christian Prommesberger, and Rupert Schreiner. Influence of adsorbates on the performance of a field emitter array in a high voltage triode setup. Journal of Applied Physics, 122(12):124503, September 2017. [ DOI | http ] |
| [KSO+17] | V. Kleshch, P. Serbun, A. Orekhov, D. Lützenkirchen-Hecht, A. Obraztsov, C. Prommesberger, C. Langer, and R. Schreiner. Field emission properties of p-type silicon tips decorated with tungsten nanoparticles. In Proceedings of the 30th IVNC, pages 138-139, Regensburg, Germany, July 2017. [ DOI ] |
| [KLP+17] | W. Knapp, C. Langer, C. Prommesberger, M. Lindner, and R. Schreiner. Investigations of the transition from field electron emission to stable plasma discharge in a micro electron source at vacuum pressure. In Proceedings of the 30th IVNC, pages 166-167, Regensburg, Germany, July 2017. [ DOI ] |
| [LLPS17] | R. Lawrowski, C. Langer, C. Prommesberger, and R. Schreiner. Microrods and microlines by three-dimensional epitaxially grown GaN for field emission cathodes. In Proceedings of the 30th IVNC, pages 130-131, Regensburg, Germany, July 2017. [ DOI ] |
| [BRS+17] | J. Bieker, F. Roustaie, H. F. Schlaak, C. Langer, and R. Schreiner. Field emission characterization of in-situ deposited metallic nanocones. In Proceedings of the 30th IVNC, pages 120-121, Regensburg, Germany, July 2017. [ DOI ] |
| [PLLS17] | C. Prommesberger, C. Langer, R. Lawrowski, and R. Schreiner. Benzocyclobutene as a novel integrated spacer material in a field emission electron source. In Proceedings of the 30th IVNC, pages 192-193, Regensburg, Germany, July 2017. [ DOI ] |
| [BDD+17] | M. Bachmann, F. Dams, F. Düsberg, M. Hofmann, A. Pahlke, C. Langer, R. L awrowski, C. Prommesberger, and R. Schreiner. Control of the electron source current. In Proceedings of the 30th IVNC, pages 66-67, Regensburg, Germany, July 2017. [ DOI ] |
| [PLL+17] | Christian Prommesberger, Robert Lawrowski, Christoph Langer, Mirgen Mecani, Yifeng Huang, Juncong She, and Rupert Schreiner. Field emission properties of ring-shaped Si ridges with DLC coating. In Ion M. Tiginyanu, editor, Proceedings of SPIE, volume 10248, page 102480H, Barcelona, Spain, May 2017. International Society for Optics and Photonics. [ DOI | http ] |
| [BDD+16b] | Michael Bachmann, Florian Dams, Felix Düsberg, Martin Hofmann, Andreas Pahlke, Christoph Langer, Robert Lawrowski, Christian Prommesberger, Rupert Schreiner, Pavel Serbun, Dirk Lützenkirchen-Hecht, and Günter Müller. Extraction of the characteristics of current-limiting elements from field emission measurement data. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 35(2):02C103, December 2016. [ DOI | http ] |
| [PLLS16b] | Christian Prommesberger, Christoph Langer, Robert Lawrowski, and Rupert Schreiner. Investigations on the long-term performance of gated p-type silicon tip arrays with reproducible and stable field emission behavior. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 35(1):012201, December 2016. [ DOI | http ] |
| [BDD+16a] | M. Bachmann, F. Dams, F. Düsberg, M. Hofmann, A. Pahlke, C. Langer, R. L awrowski, C. Prommesberger, and R. Schreiner. Extraction of the characteristics of limiting elements from field emission measurement data. In Proceedings of the 29th IVNC, pages 81-82, Vancouver, Canada, July 2016. [ DOI ] |
| [LPL+16a] | C. Langer, C. Prommesberger, R. Lawrowski, R. Schreiner, Y. Huang, and J. She. Gated p-Si field emission cathode applied in an ionization vacuum gauge. In Proceedings of the 29th IVNC, pages 145-146, Vancouver, Canada, July 2016. [ DOI ] |
| [LLPS16] | R. Lawrowski, C. Langer, C. Prommesberger, and R. Schreiner. Field emission from three-dimensional epitaxial grown GaN-microrods. In Proceedings of the 29th IVNC, pages 87-88, Vancouver, Canada, July 2016. [ DOI ] |
| [MPS+16] | S. Mingels, V. Porshyn, P. Serbun, D. Lützenkirchen-Hecht, G. Müller, C. Prommesberger, C. Langer, and R. Schreiner. Photo-enhanced field emission properties of p-doped black Si arrays. In Proceedings of the 29th IVNC, pages 15-16, Vancouver, Canada, July 2016. [ DOI ] |
| [PLLS16a] | C. Prommesberger, C. Langer, R. Lawrowski, and R. Schreiner. Field emission from black silicon structures with integrated gate electrode. In Proceedings of the 29th IVNC, pages 219-220, Vancouver, Canada, July 2016. [ DOI ] |
| [SPM+16] | P. Serbun, V. Porshyn, G. Müller, S. Mingels, D. Lützenkirchen-Hecht, M. Bachmann, F. Düsberg, F. Dams, M. Hofmann, A. Pahlke, C. Prommesberger, C. Langer, R. Lawrowski, and R. Schreiner. Field emission behavior of Au-tip-coated p-type Si pillar structures. In Proceedings of the 29th IVNC, pages 181-182, Vancouver, Canada, July 2016. [ DOI ] |
| [MPP+16] | S. Mingels, V. Porshyn, C. Prommesberger, C. Langer, R. Schreiner, D. Lützenkirchen-Hecht, and G. Müller. Photosensitivity of p-type black Si field emitter arrays. Journal of Applied Physics, 119(16):165104, April 2016. [ DOI | http ] |
| [LPL+16b] | Christoph Langer, Christian Prommesberger, Robert Lawrowski, Rupert Schreiner, Pavel Serbun, Günter Müller, Felix Düsberg, Martin Hofmann, Michael Bachmann, and Andreas Pahlke. Field emission properties of p-type black silicon on pillar structures. Journal of Vacuum Science & Technology B, 34(2):02G107, March 2016. [ DOI | http ] |
| [SLP+15] | R. Schreiner, C. Langer, C. Prommesberger, R. Lawrowski, F. Dams, M. Bachmann, F. Düsberg, M. Hofmann, A. Pahlke, P. Serbun, S. Mingels, and G. Müller. Semiconductor field emission electron sources using a modular system concept for application in sensors and x-ray-sources. In Proceedings of the 28th IVNC, pages 178-179, Guangzhou, P.R. China, July 2015. [ DOI ] |
| [BDD+15] | M. Bachmann, F. Dams, F. Düsberg, M. Hofmann, A. Pahlke, C. Langer, R. Lawrowski, C. Prommesberger, and R. Schreiner. Stability investigation of high aspect ratio n-type silicon field emitter arrays. In Proceedings of the 28th IVNC, pages 204-205, Guangzhou, P.R. China, July 2015. [ DOI ] |
| [LPL+15] | C. Langer, C. Prommesberger, R. Lawrowski, F. Müller, R. Schreiner, P. Serbun, and G. Müller. Enhanced field emission from p-doped black silicon on pillar structures. In Proceedings of the 28th IVNC, pages 104-105, Guangzhou, P.R. China, July 2015. [ DOI ] |
| [LLP+15] | R. Lawrowski, C. Langer, C. Prommesberger, R. Schreiner, S. Mingels, V. Porshyn, P. Serbun, and G. Müller. Field emission from surface textured GaN with buried double-heterostructures. In Proceedings of the 28th IVNC, pages 106-107, Guangzhou, P.R. China, July 2015. [ DOI ] |
| [SPL+15] | P. Serbun, C. Prommesberger, C. Langer, R. Lawrowski, F. Müller, F. Dams, R. Schreiner, and G. Müller. Comparison of integral and local field-emission properties of Mo-coated p-Si tip arrays. In Proceedings of the 28th IVNC, pages 192-193, Guangzhou, P.R. China, July 2015. [ DOI ] |
| [PLL+15] | C. Prommesberger, C. Langer, R. Lawrowski, F. Dams, and R. Schreiner. Gated p-Si field emitter arrays for sensor applications. In Proceedings of the 28th IVNC, pages 164-165, Guangzhou, P.R. China, July 2015. [ DOI ] |
| [SLPD14] | Rupert Schreiner, Christoph Langer, Christian Prommesberger, and Florian Dams. Compact and Energy-Efficient Field Emission Cathodes for Sensor Applications. Advanced Materials Research, 1024:372-375, August 2014. [ DOI | http ] |
| [LPL+14a] | Christoph Langer, Christian Prommesberger, Robert Lawrowski, Florian Dams, and Rupert Schreiner. Simulation and Fabrication of Silicon Field Emission Cathodes for Cold Electron Sources. Advanced Materials Research, 1024:48-51, August 2014. [ DOI | http ] |
| [LLP+14b] | R. Lawrowski, C. Langer, C. Prommesberger, F. Dams, M. Bachmann, and R. Schreiner. Fabrication and simulation of silicon structures with high aspect ratio for field emission devices. In Proceedings of the 27th IVNC, pages 193-194, Engelberg, Switzerland, July 2014. IEEE. [ DOI ] |
| [LLP+14a] | C. Langer, R. Lawrowski, C. Prommesberger, F. Dams, P. Serbun, M. Bachmann, G. Müller, and R. Schreiner. High aspect ratio silicon tip cathodes for application in field emission electron sources. In Proceedings of the 27th IVNC, pages 222-223, Engelberg, Switzerland, July 2014. [ DOI ] |
| [DS14a] | Florian Dams and Rupert Schreiner. Influencing factors on the sensitivity of MEMS-based thermal conductivity vacuum gauges. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 32(3):031603, May 2014. [ DOI | http ] |
| [LPL+14b] | Robert Damian Lawrowski, Christian Prommesberger, Christoph Langer, Florian Dams, and Rupert Schreiner. Improvement of Homogeneity and Aspect Ratio of Silicon Tips for Field Emission by Reactive-Ion Etching. Advances in Materials Science and Engineering, 2014:948708, 2014. [ DOI | http ] |
| [PLL+14] | Christian Prommesberger, Robert Lawrowski, Christoph Langer, Florian Dams, and Rupert Schreiner. Realisierung von Siliziumspitzenarrays mit integrierter Gate-Elektrode für Anwendungen in der Vakuumsensorik. In Artem Ivanov, Marc Bicker, and Peter Patzelt, editors, 4. Landshuter Symposium Mikrosystemtechnik, Landshuter Symposium Mikrosystemtechnik, pages 36-41, Landshut, Germany, 2014. Fachhochschule Landshut. |
| [LLP+14c] | Robert Lawrowski, Christoph Langer, Christian Prommesberger, Florian Dams, Pavel Serbun, Günter Müller, and Rupert Schreiner. Spitzen- und Kantenemitter aus Silizium mit einem hohen Aspektverhältnis für Ionisationsgassensoren. In Artem Ivanov, Marc Bicker, and Peter Patzelt, editors, 4. Landshuter Symposium Mikrosystemtechnik, Landshuter Symposium Mikrosystemtechnik, pages 28-35, Landshut, Germany, 2014. Fachhochschule Landshut. |
| [DS14b] | Florian Dams and Rupert Schreiner. Reduction of Gas-Species Dependency of Thermal Conductivity Vacuum Gauges by In-System Software Calibration. In Thomas Gessner, editor, Proceedings of Smart Systems Integration Conference SSI 2014, pages 459-462, Vienna, Austria, 2014. Apprimus Verlag. |
| [LPL+13] | R. Lawrowski, C. Prommesberger, C. Langer, F. Dams, and R. Schreiner. Influence of reactive ion etching parameters on the geometry of silicon tip cathodes for field emission. In Olaf Ziemann, Werner Bogner, and Jürgen Mottok, editors, Applied Research Conference 2013, pages 67-69, Deggendorf, Germany, October 2013. |
| [SLP+13] | R. Schreiner, C. Langer, C. Prommesberger, S. Mingels, P. Serbun, and G. Müller. Field emission from surface textured extraction facets of GaN light emitting diodes. In Proceedings of the 26th IVNC, Roanoke, Virginia, USA, July 2013. IEEE. [ DOI | http ] |
| [DS13] | Florian Dams and Rupert Schreiner. A high thermal resistance MEMS-based Pirani vacuum sensor chip. In Ulrich Schmid, José Luis Sánchez de Rojas Aldavero, and Monika Leester-Schaedel, editors, Proceedings of SPIE, volume 8763, page 87630P, Grenoble, France, May 2013. International Society for Optics and Photonics. [ DOI | http ] |
| [SBN+13] | Pavel Serbun, Benjamin Bornmann, Aliaksandr Navitski, Günter Müller, Christian Prommesberger, Christoph Langer, Florian Dams, and Rupert Schreiner. Stable field emission of single B-doped Si tips and linear current scaling of uniform tip arrays for integrated vacuum microelectronic devices. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 31(2):02B101, 2013. [ DOI | http ] |
| [LPD+13] | C. Langer, C. Prommesberger, F. Dams, P. Serbun, B. Bornmann, S. Mingels, G. Müller, and R. Schreiner. Si-Feldemissionskathoden für Anwendungen in miniaturisierten Ionisationsvakuumsensoren. In Verhandlungen DPG (IV), volume 48, page VA 1.4, Regensburg, 2013. [ http ] |
| [SLPD13] | R. Schreiner, C. Langer, C. Prommesberger, and F. Dams. Compact and Energy-efficient Field Emission Cathodes for Sensor Applications. In 3rd International Conference on the Advancement of Materials and Nanotechnology, page 48, Penang, Malaysia, 2013. |
| [LPDS13] | C. Langer, C. Prommesberger, F. Dams, and R. Schreiner. Simulation and Fabrication of Silicon Field Emission Cathodes for Cold Electron Sources. In 3rd International Conference on the Advancement of Materials and Nanotechnology, page 127, Penang, Malaysia, 2013. |
| [MBLH+13] | S. Mingels, B. Bornmann, D. Lützenkirchen-Hecht, G. Müller, C. Langer, C. Prommesberger, and R. Schreiner. Electric Field Dependence of Photoemission from n- and p-type Si Crystals. In Proceedings of 35th International Free-Electron Laser Conference, pages 339-343, New York, 2013. |
| [DNP+12] | Florian Dams, Aliaksandr Navitski, Christian Prommesberger, Pavel Serbun, Christoph Langer, Günter Müller, and Rupert Schreiner. Homogeneous Field Emission Cathodes With Precisely Adjustable Geometry Fabricated by Silicon Technology. IEEE Transactions on Electron Devices, 59(10):2832-2837, October 2012. [ DOI | http ] |
| [LPDS12] | C. Langer, C. Prommesberger, F. Dams, and R. Schreiner. Theoretical investigations into the field enhancement factor of silicon structures. In Proceedings of the 25th IVNC, pages 148-149, Jeju, South Korea, July 2012. [ DOI ] |
| [SNM+12] | P. Serbun, A. Navitski, G. Müller, R. Schreiner, C. Prommesberger, C. Langer, and F. Dams. Scaling of the field emission current from B-doped Si-tip arrays. In Proceedings of the 25th IVNC, pages 352-353, Jeju, South Korea, July 2012. [ DOI ] |
| [BMS+12] | B. Bornmann, S. Mingels, P. Serbun, D. Lützenkirchen-Hecht, G. Müller, C. Prommesberger, C. Langer, F. Dams, and R. Schreiner. Photosensitivity of electron field emission from B-doped Si-tip arrays. In Proceedings of the 25th IVNC, pages 382-383, Jeju, South Korea, July 2012. [ DOI ] |
| [SPL+12] | R. Schreiner, C. Prommesberger, C. Langer, F. Dams, P. Serbun, B. Bornmann, A. Navitski, and G. Müller. Highly uniform and stable electron field emission from B-doped Si-tip arrays for applications in integrated vacuum microelectronic devices. In Proceedings of the 25th IVNC, pages 50-51, Jeju, South Korea, July 2012. [ DOI | http ] |
| [PDLS12] | C. Prommesberger, F. Dams, C. Langer, and R. Schreiner. Fabrication of silicon-tip-arrays for field emission applications. In Jürgen Mottok and Olaf Ziemann, editors, Applied Research Conference 2012, pages 160-161, Nürnberg, Germany, June 2012. |
| [LPD+12] | Christoph Langer, Christian Prommesberger, Florian Dams, Rupert Schreiner, Benjamin Bornmann, Aliaksandr Navitski, Pavel Serbun, and Günter Müller. Feldemissionskathoden für Sensoranwendungen. In Helmuth Gesch, editor, 3. Landshuter Symposium Mikrosystemtechnik, pages 193-202, Landshut, Germany, March 2012. |
| [BMD+12] | B. Bornmann, S. Mingels, F. Dams, C. Prommesberger, R. Schreiner, D. Lützenkirchen-Hecht, and G. Müller. Electron spectrometer in adjustable triode configuration for photo-induced field emission measurements. Review of Scientific Instruments, 83(1):013302, 2012. [ DOI | http ] |
| [DS12] | Florian Dams and Rupert Schreiner. Indirect investigation of knudsen forces in a light mill. In Informatics. Microsystems. Information systems: Proceedings, volume 1, pages 29-39, 2012. [ http ] |
| [SNB+12] | P. Serbun, A. Navitski, B. Bornmann, S. Mingels, G. Müller, F. Dams, C. Prommesberger, and R. Schreiner. Silicon micro-tip arrays for fast-switchable cold electron sources. In Verhandlungen DPG (VI), volume 47, page O 76.1, Berlin, Germany, 2012. [ http ] |
| [BMN+12] | B. Bornmann, S. Mingels, A. Navitski, P. Serbun, F. Dams, C. Prommesberger, R. Schreiner, D. Luetzenkirchen-Hecht, and G. Müller. Photo sensitivity and field emission properties of B-doped Si-tip arrays. In Verhandlungen DPG (VI), volume 47, page O 76.2, Berlin, Germany, 2012. [ http ] |
| [BMLH+11] | B. Bornmann, S. Mingels, D. Lützenkirchen-Hecht, G. Müller, F. Dams, and R. Schreiner. Field emission spectroscopy studies on photo-sensitive p-doped Si-tip arrays. In Proceedings of the 24th IVNC, pages 101-102, Wuppertal, Germany, July 2011. [ http ] |
| [SDP+11] | R. Schreiner, F. Dams, C. Prommesberger, B. Bornmann, P. Serbun, A. Navitski, and G. Müller. Silicon-based integrated field emission electron sources for sensor application. In Proceedings of the 24th IVNC, pages 19-20, Wuppertal, Germany, July 2011. [ http ] |
| [NSM+11] | A. Navitski, P. Serbun, G. Müller, R. Schreiner, and F. Dams. Efficient and reliable field emission from silicon tip arrays for miniaturized electron sources. In Proceedings of the 24th IVNC, pages 71-72, Wuppertal, Germany, July 2011. [ http ] |
| [PDL+11] | C. Prommesberger, F. Dams, C. Langer, R. Schreiner, S. Rutkowski, B. Bornmann, and G. Müller. Simulation of electron trajectories of a field emission electron source in triode configuration by using finite element methods. In Proceedings of the 24th IVNC, pages 115-116, Wuppertal, Germany, July 2011. [ http ] |
| [DPS11] | F. Dams, C. Prommesberger, and R. Schreiner. Fabrication process of silicon-tip-arrays for field emission applications. In Proceedings of the 24th IVNC, pages 49-50, Wuppertal, Germany, July 2011. [ http ] |
| [SDS+10] | R. Schreiner, F. Dams, P. Serbun, A. Navitski, and G. Müller. Miniaturized Field Emission Electron Source for Sensor Applications. In 2nd International Workshop on Sensor Technology, Coburg, September 2010. |
| [SD09] | R. Schreiner and F. Dams. Microsensors for Vacuum Measurement. In 1st International Workshop on Sensor Technology, page 13, Coburg, September 2009. |
| [DS09] | F. Dams and R. Schreiner. A Novel Micromachined Pirani Vacuum Gauge. In 1st International Workshop on Sensor Technology, page 14, Coburg, September 2009. |
| [DWPS09] | F. Dams, S. Wicklein, H. Plöchinger, and R. Schreiner. Theoretische und experimentelle Untersuchungen des Radiometereffekts anhand einer Lichtmühle. In 100. MNU Bundeskongress, 2009, Regensburg, 2009. [ http ] |
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